July 4, 2007 — /PRNewswire/ — NEWPORT, U.K. — Surface Technology Systems plc (STS) today announced that it has sold two plasma processing systems to Harvard University, one of the prestigious “Ivy League” institutions in Northeastern USA. The inductively coupled plasma (ICP) and plasma enhanced vapor deposition (PECVD) tools will be installed within the University’s Center for Nanoscale Systems.
The Center for Nanoscale Systems (CNS) is a part of Harvard University’s Faculty of Arts and Sciences, and focuses on how nanoscale components can be integrated into large and complex interacting systems. CNS is also a member of the National Science Foundation’s National Nanotechnology Infrastructure Network (NNIN) initiative to create a national network of world-class facilities available to all researchers.
Dr. Eric Martin, technical director of the CNS at Harvard, says, “Our center is enthusiastic about working together with STS to meet the very demanding needs of leading-edge nanoscience being conducted at our facility. CNS operates on a shared-resource basis and serves hundreds of users per year. In STS we have found a partner who understands the importance of responding quickly to changing process requirements and emerging areas of materials processing.”
Andrew Tucker, general manager and VP of sales, ST Systems (USA), Inc., adds, “We are very proud to receive this order from such an internationally renowned university. These are the first tools we have sold to Harvard, and are pleased to add another key university research facility with multiple tools to our customer base.”
About Surface Technology Systems plc
STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non-“mainstream” semiconductor devices. STS serves a range of applications in several emerging sectors within telecommunications, data storage, advanced packaging, MEMS, and nanotechnology.
STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The group currently markets in over 30 countries and has an installed base of over 900 systems. For more information about STS please see http://www.stsystems.com/.
Source: Surface Technology Systems plc
Michelle Bourke of Surface Technology Systems plc
E-mail: [email protected]