Lam’s C3 linear cleaner for ultra-thin films

by Ed Korczynski, senior technical editor, Solid State Technology

Lam Research Corp. finally revealed some of the details of the technology inside its new linear atmospheric cleaner, first hinted at more than a year ago at SEMICON China. Jeff Marks, VP of new businesses for Lam Research Corp., explained to SST that the C3 tool targets high-selectivity cleans with short contact times


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