Micromanipulator’s motorized probing station features next-gen controller

July 31, 2007 — The Micromanipulator Company has introduced a new motorized, joystick-controlled probing station, the P300J which, according to the company’s director of sales and marketing Mike Jackson, “represents the next generation of our 300 mm manual / motorized probe stations.” “The station features a completely new controller and also major redesigns of the system hardware to enhance stability and reliability,” he added.

With motorized drives for interactive manual control of the probe station stage, theta, platen, and microscope, the P300J promises precision. Motorized drive allows for convenient placement of the station stage and microscope controls, negating the requirement to reach across the station’s large platen and 300 mm stage drive. Control is provided by a system joystick or Micromanipulator’s exclusive MicroTouch technology. In addition, the P300J features a carefully selected dynamic high / low speed range that enables high-resolution precise positioning as well as quick scans across a 300 mm wafer.

Micromanipulator’s RMC-7 motorized control system drives the P300J. It features an X-Y-Theta control mode for wafer alignment, a Z lockout setting to avoid accidental platen Z movements during X-Y moves, and a full X-Y-Z-Theta lock out mode to avoid movement due to inadvertent bumps during testing.

The P300J’s open design allows for ease of complex setups. The station features a “massive” base, stage support and enhanced 4-point platen drive for stability and precision. A large microscope bridge provides 100 x 100 x 200mm (X-Y-Z) high resolution travel range to support multi-site probe cards. The station is femto-amp level low current and high / low temperature (-55 to +300 deg C) ready. It can be ordered with plumbing options to support all popular hot / cold thermal chucks. The P300J supports all standard 200 and 300 mm probing accessories.

The 9020 is ideal for probing of 200 to 300mm semiconductor wafers as well as flat-panel substrates for failure analysis, wafer level reliability, and device and process characterization and modeling. It supports DC passive and active probes, RF and microwave probes and manipulators, standard and multi-site probe cards and manipulator mounted Multi-site cards (like Celadon’s Versa-Tile cards) mounted on Micromanipulator’s WAVE (WLR and Microwave) manipulator system.


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