MKS’ LIQUOZON(R) LoopO3 selected by SEZ AG

June 26, 2007 — /PRNewswire-FirstCall/ — WILMINGTON, MA — MKS Instruments, Inc., a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, has announced that SEZ AG, the world leader in single-wafer technology, has selected MKS’ LIQUOZON(R) LoopO3 dissolved ozone systems for its next-generation single wafer processors. The MKS generators were chosen because of their compact size, modular design, and unique ability to precisely deliver ultra-pure ozonated water for cleaning processes.

“By using ozonated water as the cleaning agent, the LIQUOZON LoopO3 offers an environmentally friendly alternative to existing semiconductor cleaning technologies,” says Dr. Christiane Gottschalk, senior manager of sales and customer service for ozone products with the MKS Power and Reactive Gas Products Group. “It’s cost effective, too. Its point-of-use generation of ultra-pure ozonated water and the ease of conversion of ozone back to oxygen greatly reduce costs for buying, storing, and disposal of cleaning chemicals.”

The ultra-compact, stand-alone LIQUOZON LoopO3 system is the most compact source for wet wafer processing with ozone including a pump for the recirculation loop. It features fast cycle times and up to 10 L/min of DIO3 at ozone concentrations up to 62 ppm, ideal specifications for low flow, single-wafer applications such as organic clean, water mark removal, and oxide growth. It also features closed-loop concentration control and DI water recirculation for fast response to changing flow requirements and significant water savings. These features maintain constant ozone concentration and operating pressure, assuring process repeatability at varying flow rates. The system’s unique recirculation system that results in zero UPW consumption during idle, its MTBF of >20,000 hours, and its ability to serve multiple process chambers combine to significantly reduce the cost of ownership.

Other DIO3 delivery systems in the MKS LIQUOZON product family include the LIQUOZON Single, LIQUOZON Smart, LIQUOZON 100, and the LIQUOZON XF.

About MKS
MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat-panel displays, optical storage media, architectural glass, and electro-optical products. We also provide technology for biopharmaceutical and medical imaging equipment. Our instruments, components, and subsystems incorporate sophisticated technologies to power, measure, control, and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers’ uptime, yield, and throughput, and improving their productivity and return on invested capital.

Source: MKS Instruments, Inc.

Lisa Condon of MKS Instruments, Inc.
Tel.: 978-284-4050
E-mail: [email protected]
Web site:


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