Rohm and Haas invests $60M in 193 nm immersion litho system

June 26, 2007 — /PRNewswire-FirstCall/ — MARLBOROUGH, MA — Rohm and Haas Electronic Materials will invest $60 million in leading-edge lithography equipment to support its extensive research and development of advanced 193 nm photoresist and anti-reflective coatings used in the manufacture of semiconductor devices.

“As a leading material supplier to the semiconductor industry, our ability to deliver advanced lithography materials is critical, especially as the industry moves down below the 45 nm node,” says Dr. Dominic Yang, business unit director, microelectronic technologies. “This investment will not only enable deep technical partnerships with the front runners in the memory, foundry, and logic segments, but will bring to these customers high-quality products manufactured and tested using the best tools in the industry.”

As part of its investment, Rohm and Haas Electronic Materials will purchase ASML’s TWINSCAN(TM) XT: 1900Gi 193nm Step and Scan system. This tool, along with a new 300 mm coat/develop track and state-of-the-art defect and metrology equipment, will be installed in first quarter of 2008.

Dr. Peter Trefonas, research and development director for microelectronic technologies, says the addition of an immersion tool is an important investment for Rohm and Haas. “Many of the world’s leading semiconductor manufacturers — our customers — are installing advanced immersion equipment on their commercial lines. This immersion tool investment is the right step at the right time for us,” says Trefonas.

“Our 193 nm materials are increasingly being selected as the process of record in the industry,” Trefonas adds. “As adoption of immersion technology widens, Rohm and Haas Electronic Materials will continue to push the edge of materials innovation.”

About Rohm and Haas Company
Leading the way since 1909, Rohm and Haas is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company’s technologies are found in a wide range of markets including: building and construction, electronics, food and retail, household and personal care, industrial process, packaging, paper, transportation, and water. Our innovative technologies and solutions help to improve life everyday, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.2 billion in 2006. Visit for more information.

About Rohm and Haas Electronic Materials
Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, advanced packaging, and flat-panel display industries, its products and technologies are integral elements in electronic devices around the world. Additional information about Rohm and Haas Electronic Materials can be found at

Source: Rohm and Haas Company

Jeremy Cole
Tel: 508-229-7047
E-mail: [email protected]

Dr. Rick Hemond
Tel.: 508-229-7299
E-mail: [email protected]


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