Entegris buys Surmet’s chip coatings biz

August 20, 2007 – Entegris says it has acquired assets of Surmet Corp.’s high-purity semiconductor coatings business for an undisclosed amount.

The business provides microparticle-free and corrosion-resistant coatings, utilizing a low-temperature plasma process, to protect wafer handling and equipment components such as electrostatic clamps.

The deal adds to Entegris’ lineup of products that purify, protect and transport critical materials in semiconductor applications, and gives Surmet customers a wider range of global resources, the companies said in a statement.

“In semiconductor manufacturing, the high-performance coatings offered by Surmet are indispensable,” stated Gideon Argov, president and CEO of Entegris. “Surmet’s customers should benefit from our well-established support infrastructure worldwide, and we see important opportunities to use Surmet’s technology to further enhance and differentiate our wafer handling products,” he said, adding that the company also sees potential applications for the coatings “beyond the semiconductor industry.”


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