FEI’s Phenom: SEM for the people

by Ed Korczynski, Senior Technical Editor

Traditional scanning electron microscopes (SEM) provide essential information for both R&D and quality control in semiconductor manufacturing, but are generally slow and sensitive and ultimately become R&D bottlenecks. Perusing the aisles at SEMICON West, I ran across FEI’s new Phenom, which is the size of a coffeemaker and costs a third of traditional SEMs. Note to academia and fab engineers: you’ll want one, and here’s why.


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