ISE releases five-recipe controller for MEMS production

August 3, 2007 — MEMS processing tools and equipment supplier ISE has released a five-recipe temperature timer controller (TTC) is designed for use with virtually all process etch, strip, and develop wet-process baths. Model TTC-H5 incorporates all the functions of ISE’s standard TTC-H but enables users to set up and store five separate process recipes, each of which includes a process temperature set point, high- and low-temperature alarm set points, PID parameters, and 10 years’ worth of EEPROM memory retention without power.

The H5 version is geared for R&D, university, and pilot programs where a single process bath is used for multiple processes.

Standard TTC features include an integral process timer with a count-through and pre-warn functions; a bright LED temperature and time readout; a programmable access code protection; audio and LED alarms for over temperature, low liquid level etc.; a chemical resistant membrane style faceplate; and an integral drain switch with temperature interlock.

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