Science and industry partners will have access to the Gaussian system, said Herbert Hein, Ph.D., Karlsruhe. The Vistec tool offers a high-performance 100-kV column for nanolithography applications below 10 nm. This accuracy and miniaturized lithography will lead to a range of technology developments, asserts Mike Butler, product manager, Gaussian beam systems, Vistec.
(August 22, 2007) WEST HAVEN, CT — Enthone, Inc., a business of Cookson Electronics, named Bioh Kim as process integration manager of electronic materials. Kim has a metallurgical and semiconductor packaging background.