Tegal sells plasma etch system to Japanese sensor and control maker

August 20, 2007 — Tegal Corp., designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, has received an order for a Tegal 915 batch etch system from a leading Japanese sensor and control system maker. The new Tegal 915 system will be used for photoresist strip applications in the customer’s 200mm microswitch fabrication line.

The Tegal 915 is one of Tegal’s series of diode and batch plasma etch systems. It is optimized for photoresist stripping, solar “coin stack” etching, and pad, zero layer, descum, non-selective nitride, backside, and planarization etching, for HB-LED, MEMS, Power Device, and Optoelectronic device fabrication. Its platforms can accommodate 75 mm to 200 mm round, square or rectangular substrates.

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