Rohm and Haas Orders SUSS’ Coat/Develop Cluster

(September 11, 2007) MUNICH, Germany &#151 SUSS MicroTec will install the first Famma XPress coating and developing cluster tool at Rohm and Haas’ photoresist manufacturing site in Nigata, Japan. Rohm and Haas will develop, characterize, and optimize photodielectrics, and thick- and thin-film photoresists on the Gamma tool.


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