tMt Installs Alcatel DRIE Tool for MEMS Fab

(September 10, 2007) TAIPEI, Taiwan &#151 Alcatel Micro Machining Systems (Annecy, France) shipped an advanced deep reactive ion etch (DRIE) production tool to Touch Micro-system Technology (tMt &#151 Yang-Mei, Taoyuan, Taiwan), allowing the MEMS foundry to begin producing advanced MEMS devices, including micro mirrors, silicon microphones, and gyroscopes.


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