Alcatel Receives DRIE Cluster Tool Order

(October 4, 2007) ANNECY, FRANCE— Alcatel Micro Machining Systems, a supplier of deep silicon etching equipment (DRIE) for MEMS and 3D semiconductors, has received an order for its AMS 4200 DRIE multi-chamber production tool from Boehringer Ingelheim microParts GmbH to increase volume production of MEMS micro-nozzles for Respimat inhaler.


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