MEMS nozzle maker ramps up with Alcatel tool

October 16, 2007 — Alcatel Micro Machining Systems, manufacturer of deep reactive ion etch (DRIE) equipment for the MEMS and semiconductor industries, says it has received an order for its new AMS 4200 DRIE multi-chamber production tool from Boehringer Ingelheim microParts GmbH, which plans to increase production of MEMS nozzles for its Respimat inhaler.

“We needed additional DRIE tools to ramp up the volume production for our Respimat inhalers,” said Klaus Kadel, project leader for Boehringer Ingelheim. “The new Alcatel AMS 4200 cluster tool has demonstrated the best performance between different DRIE machines tested with high throughputs for our MEMS silicon micro-nozzle production.”

Respimat inhalers deliver medication to patients with asthma or chronic obstructive pulmonary disease.


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