Dual-beam, UV Laser Link-processing System

The model 9850 dual-beam, ultraviolet (UV) laser link-processing system can be used in advanced memory-repair applications. It is reportedly the world’s first dual-beam, UV laser link-processing system designed for the most advanced nodes of DRAM and NAND Flash memory applications. The system is a memory-repair system that unites this company’s proprietary dual-beam architecture with its patented UV laser technology in one tool. The 9850UV produces a 0.8-micron spot size by utilizing ESI’s new 100-kHz UV laser, which was developed specifically for advanced DRAM and NAND Flash applications. The system is able to process small link pitches and can handle two banks of links in parallel due to the proprietary dual-beam architecture, effectively halving the number of links to process on a wafer. ESI Inc., Portland, OR, www.esi.com.


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