MKS Instruments acquires Yield Dynamics

November 8, 2007 — /PRNewswire/ — WILMINGTON, MA — MKS Instruments, Inc., a leading worldwide provider of monitoring and control technologies for improving productivity in semiconductor and other advanced manufacturing processes, announced that it has acquired privately held Yield Dynamics, a provider of yield management technology based in Sunnyvale, CA. The acquisition is expected to be slightly accretive going forward and is not expected to materially affect MKS’s near term financial results.

Leo Berlinghieri, MKS’s CEO and president, says, “Semiconductor fabs need to improve yield to meet production cost targets as they transition to smaller device geometries. We see opportunities to increase our sales to semiconductor fabs with a total solution for managing and correlating process data to improve process yield. We also see long-term opportunities for our yield management solution in flat-panel display, solar cell, and other markets that use thin-film manufacturing processes.”

Yield Dynamics’ data and yield management software, along with MKS’s portfolio of sensors that control critical processes, data collection and integration hardware, and real-time fault detection and classification software, provides a comprehensive offering for generating, collecting, and analyzing process sensor data and correlating the data to wafers, chambers, and tools across the fab.

Berlinghieri continues, “By correlating real-time process chamber information with offline production analysis on wafer yield, fabs could achieve higher yield. We believe we can help fabs identify additional information from our sensors that, when integrated with fault detection and classification and yield management software, could allow fabs to take a step closer to predicting process excursions before they happen and improve yield while reducing cost.”

Jonathan Buckheit, president and CEO of Yield Dynamics, says, “We are pleased to join an industry leader with technology focused on improving process productivity, and by offering a solution-driven approach to yield improvement we expect to deliver added value.”

About MKS
MKS Instruments, Inc. is a leading worldwide provider of process control solutions for improving productivity in advanced manufacturing processes such as semiconductor device manufacturing; thin-film manufacturing for flat-panel displays, data storage media, architectural glass and electro-optical products; and technology for medical imaging equipment and other markets. The company’s instruments, components, and subsystems incorporate sophisticated technologies to power, measure, control, and monitor increasingly complex gas related semiconductor manufacturing processes, thereby enhancing our customers’ uptime, yield and throughput, and return on invested capital.

Source: MKS Instruments, Inc.

Visit www.mksinst.com

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