Oxford Instruments to equip new UK lab

December 13, 2007 — Oxford Instruments has received an order for nine process tool systems worth more than £2.5m ($5m) to equip a new cleanroom facility at the University of Southampton in the UK, the company announced in a news release.

The new Mountbatten research complex will serve the School of Electronics and Computer Science and the Optoelectronics Research Centre. Completion of the new building is anticipated for summer 2008.

The nine systems will provide the university with capabilities in research and development of novel nanoelectronic, MEMS and photonic devices. The order includes both plasma etch and deposition tools, with two Plasmalab System100 ICP etch tools, two Plasmalab80Plus open-loading RIE tools and two PlasmalabSystem100 PECVD tools, plus a number of Oxford Instruments’ newest products: a FlexAL plasma/thermal atomic layer deposition (ALD) tool, a Nanofab nanowire and nanotube growth tool, and a large-chamber Ionfab ion beam system.


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