300mm Wafer Probe Station

The Elite 300 300mm wafer probe station for devices with process nodes at 45 nm and below incorporates state-of-the-art electrical and mechanical technology, advanced materials, and leading-edge measurement techniques. The station offers end-to-end productivity improvements through its advanced ergonomic design, measurement capability, and flexibility. Applications include RF/DC device characterization and modeling, wafer-level reliability, IC failure analysis, and design debug. The Elite 300 is reportedly the lowest-noise environment for ultra low-level noise measurements. The software automatically tracks wafer movement; an upward-looking camera system is included for advanced vertical probe cards. It offers a wide standard temperature range (–60°C to 300°C) plus a 400°C thermal chuck option. A hands-free microscope bridge mount system, smart cabling, accessory shelves, and ergonomic armrests all ensure faster setup and easier navigation to, and within, test die. A 300mm large-area microscope system, with video and software navigation, eases verification of large area and full-wafer needle contact. Cascade Microtech, Beaverton, OR; www.cascademicrotech.com.


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