Akrion ships single-wafer pre-photolithography clean system

December 20, 2007 — /PRNewswire/ — ALLENTOWN, PA — Akrion, Inc., a supplier of semiconductor surface preparation equipment, recently shipped another Velocity(TM) single-wafer cleaning system to a major IC device manufacturer in Asia.

The Velocity system will be used for an advanced pre-photolithography cleaning application. This cleaning application is important as it minimizes the photolithography re-work that is typically required due to wafer backside contamination. All IC device manufacturing includes several costly photolithography steps. Backside contaminants cause a number of problems for fabs, such as depth of field problems that cause pattern misprints. Minimizing the number of re-work steps reduces the costs of IC device manufacturing.

The system shipped will include Akrion’s latest megasonic technology: Goldfinger(R) for front-side cleaning in tandem with the latest backside megasonics. Akrion’s proprietary megasonic technology, protected by numerous patents, combines front-side and backside cleaning in one step, in one tool. This greatly reduces capital outlay and has the added benefit of combining post-deposition and pre-photo cleans in one step.

James S. Molinaro, Akrion president and CEO, says, “We believe that our megasonic technology gives us a great advantage for particle removal applications. Our ‘super-scrubber’ and ‘pre-photo’ cleans combine cleaning steps to reduce overall IC production costs. Backside defect removal will become even more important as new immersion lithography technologies become mainstream.”

About Akrion
Akrion is a provider of advanced surface preparation systems used in the manufacture of semiconductor devices. The company’s products, which include single-wafer and batch-immersion cleaning systems, are used in the production of a wide variety of semiconductor devices, including logic devices, analog devices, flash memory, DRAM, and MEMS, and are used to clean bare silicon and test wafers as well as photomasks. Headquartered in Allentown, PA, Akrion’s Allentown production facility is ISO 9001:2000 and ISO 14001:2004 certified.

Visit www.akrion.com

Source: Akrion, Inc.


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