Equilibar’s new vacuum regulator promises extreme stability

The Equilibar Vacuum Regulator promises more than 5X the flow stability of traditional spring regulators. (Photo: Equilibar)

January 25, 2008 — According to Equilibar, the company’s new Equilibar Vacuum Regulator provides more than 5X the flow stability of traditional spring regulators, and thus provides a constant vacuum process across varying gas flow changes.

The unit is actually two vacuum regulators in one, with a small pilot regulator controlling a larger regulator below. The conveniently placed, highly sensitive 20-turn regulator lets you generate set-point pressure. Taken together, these two regulators provide highly sensitive and stable control with all the simplicity and convenience of standard vacuum regulators. “The advantage of this setup is that the customer can have the precision and sensitivity of a vacuum regulator under ideal (no-flow) conditions together with the advantage of having a larger regulator rated for higher flow rates, and also made of chemically resistant materials,” the company explains. “With existing products, there is no good option for high precision under widely varying gas flow rates. Our regulator can be used in processes where steady state vacuum is a must, such as coating and cryogenics.”

And, the company adds, “The integrated product is as simple as a single regulator because there is only a single inlet and a single outlet.” Based on the same patented technology as the Equilibar Back Pressure Regulator, the new vacuum regulator can precisely match vacuum process requirements by using signal pressure.

With only one moving part, the Equilibar Vacuum Regulator directly modulates the applied vacuum without having to bleed air into the vacuum system — and this allows it to precisely control from 0-27 in Hg. For convenience, the regulator can be installed between the vacuum pump and the process.

The Equilibar Vacuum Regulator is available in SS316 and PTFE bodies and Viton and PTFE diaphragms for aggressive chemistries.


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