Freescale Selects 200mm SUSS Tool Set for MEMS Facility

With shrinking design rules, MEMS devices must be produced with higher precision and accuracy to ensure reliability and the required performance. With an accuracy of 0.2 micron at 3 sigma, the DSM system demonstrates excellent measurement results in automated mode. Working in concert with the SUSS Compact series mask aligner, these two machines represent the perfect package for double-sided alignment and exposure applications frequently used in the manufacturing of MEMS, power semiconductors and optoelectronic devices.

(January 17, 2008) AUSTIN — Freescale Semiconductor has established an advanced microelectromechanical systems (MEMS) 200-mm (8-inch) production line to address growing sensors market demand. The newly added line at Freescale’s Oak Hill Fab in Austin, TX, complements the company’s existing 150-mm (6-inch) MEMS capacity in Sendai, Japan.


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