All-surface Macro Defect Inspection Module

The AXi 940 module will perform wafer front-side inspection as part of the all-surface Explorer Inspection Cluster, a multisurface inspection system designed to provide reliable macro inspection. The AXi 940 has a redesigned software interface focused on reducing cost of ownership through improved productivity and reliability, as well as reduced dependence on human operators. The AXi 940’s intelligent software reduces the amount of time required for recipe creation by automating many of the tasks and decisions that normally are done by the tool operator. In addition, the all-surface Explorer Inspection Cluster gives users the ability to take the AXi 940 module offline for recipe creation while keeping all other modules in the cluster in production. Previously, if one module had to be worked on, the entire tool would have to be taken off-line. Rudolph Technologies, Flanders, NJ; .


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