ATMI, Ovonyx to develop CVD precursors for phase-change memory

Mar. 25, 2008 – ATMI and Ovonyx say they have agreed to develop chemical vapor deposition (CVD) precursor materials and processes for use in high-volume manufacturing of phase change memory (“PCM”) products based on Ovonyx’s PCM technology. The agreement also provides certain cross-licensing of patents and technology between the two companies.

“PCM is on the verge of commercial adoption using conventional deposition techniques; however, subsequent generation CVD deposition of phase change materials and delivery processes will further increase scalability and accelerate cost reductions,” said ATMI CEO Doug Neugold, in a statement. “By applying our high productivity semiconductor precursor materials development, delivery, and deposition process expertise with Ovonyx’s PCM knowledge, we believe that, together, we can accelerate the adoption of CVD phase change material deposition into high volume production.”


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