Entegris invests in furnace tooler IMI

Mar. 6, 2008 – Entegris says it has invested $8M for a 14% equity stake in privately held Integrated Materials, a supplier of wafer carriers used in diffusion and RTP thermal processes, and plans to acquire the remaining equity “upon completion of certain closing conditions.”

“The access to IMI’s breakthrough technology dovetails with our focus on improving the productivity of our semiconductor customers by controlling contamination in their manufacturing process,” said Entegris president/CEO Gideon Argov, in a statement. He specifically noted IMO’s consumables technology, which uses a polysilicon material to reduce particle contamination, which will extend Entegris’ wafer handling portfolio.

For IMI, the new ownership through Entegris opens up a more global geographic footprint, with expanded support and applications capabilities, added Daniel Rubin, president/CEO of IMI.


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