memsstar MEMS tools enter Japanese market under Canon agreement

April 3, 2008 — Edinburgh, Scotland-based memsstar Technology, a supplier of etch and deposition equipment supplier to the MEMS industry, has signed a memorandum of understanding with Canon Marketing Japan to cooperatively market and promote memsstar products to leading Japanese MEMS manufacturers and developers.

The partnership supports the company’s increased focus on the Asia-Pacific region. This follows the recent opening of offices in the United States, due to the growing interest and demand for memsstar’s chemical etching and coating technology in the region.

memsstar uses vapor phase single wafer processing for the release etch and surface modification process steps as required in most MEMS devices. The company says its systems deliver fast throughput, small footprint, low consumption and emissions, scalable platforms, process controls and high repeatability at a low entry level cost.

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