Ushio tips new power-saving halogen lamp for films

Apr. 9, 2008 – Ushio has developed technology for a multifilament halogen lamp heater for use in fabricating films for semiconductors and solar cells, notes the Nikkei Business Daily.

The halogen lamp has three filaments instead of one, attached with a proprietary support structure and fitted in series (left-center-right); each can be operated separately for greater control over substrate heating, and spacing can be adjusted from 9mm down to 5mm. The more precise control also means less wasteful heating beyond the substrate borders, reducing power consumption by 30%, the company claims.

Evaluation samples will ship starting in May with sales targeted in July. Pricing for the customer-spec’ed heaters will be ~30%-50% higher than normal halogen lamp heaters.


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