UV Laser for High-speed Die Singulation

Due to Coherent’s proprietary PulseEQ technology, the laser can deliver low pulse energy at a 250 kHz repetition rate, which is said to be ideal for gently scribing through thin (typically 10 &#181m) epitaxial circuitry layers. The same laser can also be operated at lower repetition rates, with pulse energies as high as 80 &#181J, making it an optimum tool for dicing through the wafer itself. Because of fully automated active optimization proprietary functions such as PulseEQ, ThermEQ and PosiLock, the pulse repetition rate and pulse energy can be rapidly changed with no effect on the laser’s beam quality (M2 < 1.3), high pulse to pulse energy stability (noise < 5% rms at 70 kHz), and beam pointing.

(April 4, 2008) SAN JOSE, CA and BELMONT MA&#151 Tessera Technologies, Inc. provider of miniaturization technologies for the electronics industry, and Kronos Advanced Technologies, Inc. developer of ionic- based products and technologies for air movement and purification, announced the sale and licensing of certain intellectual property (IP) rights related to Kronos proprietary technologies to Tessera.


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