Off-the-shelf MEMS microhotplates commercially available for chemical sensor applications

June 24, 2008Kebaili Corporation a high-tech MEMS and nanotechnology company, has released the KMHP-100 Series, the industry’s first commercially available off-the-shelf MEMS microhotplates for researchers and scientists in innovative chemical sensor research and development applications.
KMHP-100 MEMS microhotplate consists of a micromachined silicon die attached to a gold-plated TO-18 package, which insures reliable and stable continuous operation in harsh and hostile environment applications. The platinum resistive thin-film microheater sandwiched between freestanding thin-film silicon nitride and silicon dioxide membranes allows the microhotplate to operate continuously and reliably at temperatures up to 650 degrees C. The freestanding thin-film silicon nitride membrane thermally and electrically isolates the platinum microheater from the silicon substrate microstructure, and provides the microhotplate with a low thermal mass. The KMHP-100 MEMS silicon chip is based on Kebaili Corporation’s proprietary 1mm x 1mm microchip die size MEMS microsensor platform technology.
Kebaili Corporation KMHP-100 microhotplates will allow researchers and scientists to develop innovative and ultra-highly sensitive and selective chemical sensors based on MEMS, nanotechnology, sol-gel processes, doped metal oxides, polymers, functionalized carbon nanotubes and nanowires. These novel chemical microsensors will be used in medical, industrial, military, automotive, environmental, agricultural, space and homeland security applications.
By using off-the-shelf KMHP-100 microhotplates, scientists doing research and development work on novel chemical microsensors based on MEMS microhotplate platform, can significantly reduce their development cost, and lower their development time from several weeks to only few days or few hours depending on their process and target application.


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