SEMI tips standards for FPDs, MEMS, chips

June 25, 2008 – SEMI has published four new technical standards targeting substrate and processes in LCD, MEMS, and semiconductor manufacturing, as part of its triannual standards update.

The new standards include:

– D53-0708: Standards for stand off, transmittance, and strength of pellicle films for FPD masks;
– D52-0708: Simplifying positioning, identification and traceability of larger LCD substrates with 2D code;
– MS7-0708: Describes MEMS microfluidics/microelectronics connection attributes and dimensions; and
– T19-0708: Specs for an identification-code system for bare die up to complete assembled devices.

The new standards, part of SEMI’s July 2008 publication cycle, join more than 770 standards published by SEMI since its Standards Program was established in 1973.

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