Electron Source Module

The extreme field emission gun (X-FEG) electron source module for FEI’s Titan family of scanning transmission electron microscopes (S/TEMs) combines higher brightness with the high, ultra-stable current of thermally-assisted field emission. This combination is said to improve resolution, speed, sensitivity and ease of use to the Titan.

X-FEG is a refinement of the Schottky thermally-assisted field emission technology that FEI pioneered for electron microscopy applications. High brightness and spatial coherence improve resolution and contrast in atomic-scale imaging and holography. High-beam current yields faster, more precise analytical results, while smaller convergence angles improve the spatial resolution of the analysis. Beam current stability improves the accuracy and repeatability of lengthy procedures such as focus series image reconstruction, chemical and elemental (X-ray) mapping, 3D tomographic reconstruction, and automated analysis. Low-voltage performance and high spatial coherence improve contrast and reduce damage in fragile, dose-limited biological materials. Operational simplicity, the absence of tip cleaning (flashing) requirements and extended tip lifetimes (12 months), is said to boost productivity and reduce cost of ownership in process control applications. FEI Company, Hilsboro, OR, www.fei.com

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