Cambridge NanoTech uncrates new ALD system

October 20, 2008: Cambridge NanoTech, a supplier of atomic layer deposition (ALD) systems for research and industry, has released the first Savannah S300 system. The S300 builds on the success of the S100 and S200, offering the same combination of ease of use, reliability and experimental flexibility in a larger format, capable of handling substrates up to 300mm in size.

“We are pleased to announce the first sale and shipment of the newest addition to our highly successful Savannah family — the S300,” said Dr. Jill Becker, founder of Cambridge NanoTech. “The S300 has all the capabilities that our customers value in the S100 and S200, in a compact and affordable format that can accommodate larger substrates.”

With more than 110 Savannah systems shipped worldwide, Cambridge NanoTech has established itself as a leader in ALD systems and services for research and industry. Experiments conducted on the Savannah family of systems by leading ALD researchers have resulted in the publication of more than 100 peer-reviewed articles. The newest addition to the Savannah family will be on display at the American Vacuum Society conference in Boston, MA during the week of October 20th and can be seen by visiting Cambridge NanoTech in booth #402 at the Hynes Convention Center.


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