Heidelberg Instruments supports bioMEMS work at Thailand university

October 27, 2008 Heidelberg Instruments announced the sale of a μPG101 tabletop maskless laser patterning system to the Department of Chemical Engineering at the Chulalongkorn University in Thailand. This tool will be used for various research in the BIOMEMS area.

The μPG101 is an economical and easy-to-use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4in × 4in, and is capable of exposing high-resolution features with an address grid of 100nm.

The μPG101 maskless lithography system offers a small footprint of 60cm × 60cm. It presents a highly flexible, out-of-the-box tool capable of layer-to-layer alignment through its integrated camera system.


μPG 101 tabletop laser pattern generator.

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