December 8, 2008: Memscap, a provider of innovative solutions based on micro-electromechanical systems (MEMS) technology, is now offering a Mumps manufacturing and prototyping services platform that can create submicron features on Mumps polysilicon wafers, what the company says is the first such manufacturing/prototyping service to be offered on the nanoscale (below 1μm) for mechanical structures.
Taking place alongside the company’s other existing runs (Poly Mumps, SOI Mumps, Metal Mumps), Nano Mumps will benefit from the more than 16 years experience of Mumps and its track-record of success that led to more than half a million MEMS devices shipped to over 1000 customers. The expertise gained with other runs will also enable to keep the same process length, allocate more space for devices on each run, give customers the possibility to compare the advantages of micro and nano processes before going to volume manufacture, and, offer customers the most cost-effective manufacturing and prototyping services for nanomachines.
The applications for this new process include from mirrors, fuel cells, fluidics, renewable energies, accelerometers, and medical/biomedical applications.
Image of a dual assembled platform from a MUMPS run. (Credit: Rob Johnstone)