Wafer-level Probe Operating Environment

The ProberBench Operating Environment, from SUSS MicroTec Test Systems, is a full-featured software suite designed for efficient, intuitive and safe wafer-level probing. Development of the interface and architecture was reportedly based on a three-month user study in the laboratories semiconductor design houses and manufacturers, who expressed needs such as less confusing interfaces, automated procedures, and easy-to-read feedback.

The new software includes a control center, which places navigation and control elements at the user’s fingertips and providing instant feedback about wafer and probe positions. Also included is the SPECTRUM Vision System, which is the main vision application and supports up to four live video feeds like ContactView &#151 a horizontal view of the probe tips and wafer for eliminating probe card and wafer damage &#151 and an upward-looking camera for viewing the tips of fine-pitch, vertical probe cards.

Optional automation tools include a tool for automatically aligning the wafer and generating a wafer map. It is also designed to communicate with test executive software like Agilent’s IC-CAP, Keithley’s KITE, ProPlus’ BSIMPro and many others. Combining this feature with SUSS MicroTec’s unique Automated Thermal Management and ReAlign Technology enables unattended test routines over multiple temperatures that can be run overnight and on weekends. SUSS MicroTec Test Systems Dresden, Germany, www.suss.com.


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