Making a pitch for EUV

Stefan Wurm, AMD assignee to SEMATECH and associate director of the Lithography Division, provides an update on EUV lithography in his interview with Debra Vogler, Sr. Technical Editor, for SST On the Scene.

“We’ve gone from asking ‘Will EUV work’ to “Will it work at yield,'” Wurm points out. “We need to keep investing as an industry in the infrastructure to make it happen.” He believes the industry wants to see EUV work in anticipation of its potential at 22nm, 16nm, and possibly 11nm.


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