July 14, 2009 – SEMATECH’s Bryan Rice gives a positive assessment of EUV and offers hope for getting companies to open their checkbooks for mask inspection infrastructure funding. It’s no longer a matter of “if” but “when,” he says — and see news below of an imminent 100W source.

Key stakeholders have indicated they’re prepared to embrace EUV, and “the technology people have been primed” — but they’re still not ready to hand over big investments until funding is apparent. Rice is hopeful that after this week’s SEMICON West, the industry will “be in a position to maybe see the light at the end of the tunnel” for when money to fund EUV will become available.