Applied Materials iSYS Integrated Subfab System wins SEMICON West Sustainable Technologies Award

(July 26, 2010) — SEMI has announced that Applied Materials, Inc. is the recipient of its 2010 SEMICON West Sustainable Technologies Award in recognition of the Applied iSYS Integrated Subfab System. The Sustainable Technologies Award winner was selected with technical guidance from a panel of technology industry environmental, health and safety experts representing academia, research communities and semiconductor device manufacturers.

The award was presented by SEMI at SEMICON West. The five finalists for the award were: Applied Materials, Inc.; Edwards Ltd.; Pall Corp.; Tokyo Electron Ltd.; and Verigy Ltd. Applied Materials was selected as the winner based on an assessment of specific sustainability performance criteria met by its iSYS system.

The innovative Applied iSYS platform is a fully integrated abatement and vacuum pumping solution for controlling emissions and reducing energy costs in the semiconductor fab. Synchronized with an Applied process tool, the iSYS system can deliver typical annual savings in power, water and gas consumption equivalent to 200MWh of energy or 220,000 pounds of CO2 emissions, compared to currently available configurations. Utility metering sensors are built into every iSYS platform to track progress in reaching high energy and sustainability targets. The system’s open architecture accommodates a wide range of abatement and pumps, enabling customers to tailor the system to match their specific needs, assuring process transparency and streamlining implementation.

“This award recognizes Applied’s company-wide focus on providing solutions to our customers that make both sound business and environmental sense,” said Charlie Pappis, vice president and general manager of Applied Global Services. “Customers have been very excited about the integrated iSYS solution since they understand the tremendous opportunity it offers to achieve their sustainability targets while also lowering the operating costs of their equipment.”

“We were pleased with the number of worthy contenders for the Sustainable Technologies Award this year. All of these companies reinforce the industry’s commitment to the environment. We congratulate Applied Materials for winning the award this year, which focuses on companies exhibiting at SEMICON West that have taken a leadership role in product sustainability,” said Jonathan Davis, president of SEMI North America.

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Applied Materials, Inc. (Nasdaq: AMAT) is the global leader in Nanomanufacturing Technology™ solutions with a broad portfolio of innovative equipment, service and software products for the fabrication of semiconductor chips, flat panel displays, solar photovoltaic cells, flexible electronics and energy efficient glass. Learn more at Read Debra Vogler’s coverage of the iSYS launch here:

SEMI is the global industry association serving the manufacturing supply chains for the microelectronic, display and photovoltaic industries. For more information, visit See more news and information from SEMICON West 2010.


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