Faster scatterometry metrology: GlobalFoundries

(July 15, 2010) — Alok Vaid of GlobalFoundries, explains the technology in his paper on time-to-solution for scatterometry metrology. Scatterometry takes a long time, but Vaid proposes a new approach with more automation.

More from Global Foundries at the show:
Global Foundries lays out road-map for advanced silicon
AMD spin-off Global Foundries has been detailing how it will overcome the technical challenges of mass producing silicon hardware at 28nm and beyond.
Read the story from SEMICON West at

Get all the latest news, podcasts, videos and more from SEMICON West at


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.