(July 15, 2010) — Alok Vaid of GlobalFoundries, explains the technology in his paper on time-to-solution for scatterometry metrology. Scatterometry takes a long time, but Vaid proposes a new approach with more automation.
More from Global Foundries at the show:
Global Foundries lays out road-map for advanced silicon
AMD spin-off Global Foundries has been detailing how it will overcome the technical challenges of mass producing silicon hardware at 28nm and beyond.
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