Video interview with Entegris: Contamination control at 22nm and below

(July 30, 2010) — In this video interview from SEMICON West 2010, Christopher Wargo, Entegris, talks contamination control at 22nm and below. Lithography presents a suite of issues for contamination control. While the technology exists to confront new contaminants, commercialization is key. Wargo speaks with senior technical editor Debra Vogler.

See all the video interviews from SEMICON West on Solid State Technology’s homepage, at


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