Nanofabrication available on Carl Zeiss helium ion microscope

(August 2, 2010) — Carl Zeiss SMT debuted an integrated gas injection system on the ORION Plus Helium Ion Microscope. The gas injector reportedly delivers superior nanofabrication, deposition and etch.

Tungsten Pillar deposited with Helium Ion Beam (7700nm tall and 45nm diameter) (Photo: Business Wire)

The combination of a sub-nanometer (<0.35nm) probe of inert gas ions with a small interaction volume at the sample surface enables highly precise induction chemistries. The resulting structures have extremely small dimensions and high profile fidelity.

Dr. Paul Alkemade at the Kavli Institute of Nanoscience, Delft University of Technology, is one of the early researchers in helium ion-induced deposition and etching. According to Dr. Alkemade, "The optimum instrument for nanofabrication requires both high spatial resolution and high deposition efficiency. Fortunately, the Helium ion beam on the ORION Plus instrument provides resolution for deposition that is even better than that achieved by a scanning electron microscope (SEM). In addition, the Helium ion beam provides deposition efficiencies that are very similar to those achieved with a heavy ion (Ga) focused ion beam (FIB) instrument. With the integration of a Gas Injection System, the ORION Helium Ion Microscope is proving to be the right instrument for nanofabrication research." Read more about nano production equipment here: 

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The controls for the Gas Injection System (GIS) are integrated through the ORION Plus system software. The GIS unit contains three crucibles capable of delivering metal and insulator deposition and insulator etch chemistries. User programmable recipes can be created and recalled allowing for complex deposition and etch processes. The Gas Injection System on the Orion Plus creates a powerful and flexible platform enabling state-of-the-art nanofabrication applications.

Carl Zeiss SMT AG comprises the Semiconductor Technology Group of the Carl Zeiss Group. Carl Zeiss SMT manufactures lithography optics and light, electron and ion-optical inspection, analysis and measuring systems. Further information is available at

Other Carl Zeiss SMT product news:

Carl Zeiss debuts SEM with enhanced resolution in the low kv region 

Carl Zeiss delivers "complete" optics for production EUV

Zeiss debuts "correlative microscopy" elements

Zeiss touts particle analysis add-on for SEMs

Carl Zeiss adds nanopatterning engine for FIB/SEMs

Zeiss adds variable pressure to Sigma FE-SEMs 


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