University of Bergen chooses Plasma-Therm 790+ system for nano-fab facility

(August 10, 2010) — The Department of Physics and Technology at the University of Bergen, Norway, selected Plasma-Therm 790+ Reactive Ion Etcher for its nano-fabrication facility. The University of Bergen’s system addition to their facility will assist in the development of free-standing Fresnel zoneplates for neutral helium microscopes. The 790+ RIE equipment will also support university work on biophysics experiments in surface engineering and nano-science experiments to test optical and magnetic properties of nanostructures.

“As we move forward with the reach of our experiments, we are constantly searching for reliable, flexible tools that support us in our research and help us push the limits of nano-science. The 790+ system is one of the tools we are using to define the future of nanotechnologies,” said Professor Bodil Holst, Nanoscience Programme Leader at the University of Bergen’s Department of Physics and Technology.

The 790+ RIE provides a flexible technical solution for etching the variety of structures and materials required for advanced research. Simple operation coupled with manual loading on a large electrode addresses the multiple needs of a university operating environment where different substrate sizes and shapes in addition to ease of use by multiple users is key. “The increased area of the 790+ electrode increases uniformity and throughput while maintaining affordability for both university and production settings,” said Ed Ostan, executive vice president of sales & marketing at Plasma-Therm.

Plasma-Therm is a supplier of advanced plasma process equipment that focuses on various specialty markets including photomask, solid state lighting, thin film head and compound semiconductors. Learn more at

The University of Bergen, located in Bergen, Norway, is a research university emphasizing basic research, research-based teaching, and the development of academic disciplines. The Faculty of Mathematics and Natural Sciences is one of six faculties at the University of Bergen and has around 2700 students. The Faculty consists of eight departments, including the Department of Physics and Technology, which provide the foundations for its teaching and research activities.

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