Vacuum pump for wafer fab quiets vibration: Pfeiffer Vacuum

(August 31, 2010) — Pfeiffer Vacuum is unveiling a new series of high-performance magnetically levitated turbopumps, the HiPace M. HiPace M vacuum pumps have high pumping speeds (300 I/s, 700 I/s and 800 I/s) and achieve high compression ratios for all gases.

These vacuum pumps are optimized to run in all orientations with a low vibration signature. An advanced rotor design provides unlimited rotor service life and dependable operation. The pumps are rated Protection Class IP54, which means that they can be used in harsh industrial environments. Applications include analytical industry, coating and semiconductor technology, and R&D. An intrinsically low dynamic magnetic field does not interfere with even the most sensitive equipment.

The integrated electronic drive unit in the HiPace M reduces the need for cabling and alleviates accidental cable failure. Power consumption and run up time were reduced. Aluminum housings make the vacuum pumps lightweight. An optional sealing gas connection safeguards against particulate buildup and oxidizing gases.

Pfeiffer Vacuum manufactures components and systems for vacuum generation, measurement and analysis. Pfeiffer Vacuum North American operations offer marketing, sales, field services, repair, customer training, and applications and support. Learn more at

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