Video: Wafer bevel inspection and other defectivity points

(August 11, 2010) — Jennifer Braggin, Entegris, chaired a session at ASMC, co-located with SEMICON West in San Francisco in July, on defect inspection. In this video, she summarizes the key points: new processes and materials add new detection challenges, and analysis from the lab is now moving into the fab. Wafer-edge inspection is highlighted.

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