Defense device maker adds Plasma-Therm VERSALINE RIE etch

(September 1, 2010) — Plasma-Therm LLC, supplier of plasma etch and deposition process equipment, delivered a VERSALINE RIE etch system to a leading manufacturer of high-technology defense systems from the EMEA region.

This international manufacturer designs, develops and produces high technology defense systems for aerospace, naval, and land-based applications. The VERSALINE etch system, which complements other Plasma-Therm process equipment at this facility, was selected for its proven reliability and reproducibility during the fabrication of devices for mission critical components. Low maintenance and process flexibility makes the VERSALINE RIE ideally suited for multiple device fabrication steps and provides the defense industry with a valuable asset for R&D and production. 

The system is configured to enhance processing technology with features including EndpointWorks integrated with the system’s control software to output real-time in situ process data and reproducibility.

“The VERSALINE platform has the ability to support a number of different technologies,” states Dr. David Lishan, director of technical marketing at Plasma-Therm.

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Plasma-Therm LLC is a U.S. based supplier of advanced plasma process equipment that serves various specialty markets including MEMS, photomask, solid state lighting, thin film head and compound semiconductor. For more information, visit


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