JEOL new SEM features integrated EDS, new-gen SDD tech

(September 23, 2010) — JEOL introduced the InTouchScope, an analytical, low-vacuum scanning electron microscope (SEM) featuring integrated energy dispersive spectroscopy (EDS) with the latest silicon drift detector (SDD) technology. 

The new InTouchScope has the familiar feel of today’s personal electronic media.  The intuitive multi-touch screen interface puts all SEM Apps at the operator’s fingertips. The user can expand windows and images with the sweep of two fingers, dial in magnification and focus with a swipe, and select operating parameters, analytical functions, or measure distances just by tapping the PC or notebook touch screen. 

Ease of use functions include automatic SEM condition set up based on sample type, simultaneous multiple live image and movie capture, easy sample navigation at 5 to 300,000x magnifications, quantitative and qualitative elemental analysis, low and high vacuum operation, and wireless capability.

Other SEM product debuts

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Improving statistical validity with Macro CD-SEM imaging

The InTouchScope features all the capabilities of a full-size tungsten SEM with integrated EDS analysis in a small, ergonomic and intuitive design.  An onboard turbo pump make this a self-contained, portable SEM that can be set up anywhere in the lab.

JEOL supplies electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs. JEOL USA Inc. is a wholly owned subsidiary of JEOL, Ltd., Japan. For more information, visit

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