Mattson Suprema photoresist strip systems ordered for FEOL and BEOL logic fab

(October 6, 2010 – Marketwire) — Mattson Technology Inc. (NASDAQ: MTSN), advanced wafer fab process equipment supplier, received orders for multiple Suprema photoresist strip systems from a new Asian customer. The Supremas will be used in both front-end-of-line (FEOL) and back-end-of-line (BEOL) applications for advanced logic device production. The systems are scheduled to ship in the fourth quarter of 2010.

"The Suprema won head-to-head competitive evaluations to become the process tool of record as a result of its productivity, reliability, and on-wafer performance," said Rene George, VP and GM of Mattson Technology’s Plasma Products Group. "To address critical logic processes that require low silicon loss and ultra-low defectivity, the Suprema provides advanced processing capabilities for demanding strip and clean applications."

The new customer is satifying initial fab production requirements and will ramp capacity in the future.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. Learn more at

Subscribe to Solid State Technology/Advanced Packaging. Follow Solid State Technology on via editors Pete Singer, and Debra Vogler, Or join our Facebook group


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.