Bruker intros AcuityXR to improve optical surface profiling <130nm

(December 13, 2010) — Bruker Corporation (NASDAQ: BRKR) debuted the AcuityXR optical surface profiler mode that combines patent-pending Bruker hardware and software technology to enable select ContourGT non-contact, 3D optical surface profilers to break the optical diffraction limit and deliver better lateral resolutions.

Many nanoscale applications in the semiconductor, medical, and precision machining fields today have surface features and defects with dimensions that limit detection or identification due to the optical diffraction limit. Such miniscule features and defects often directly affect function, performance, quality and/or manufacturing yields and are of great interest to researchers and production QA/QC.

Bruker optical surface profiler systems equipped with the AcuityXR mode have shown resolution of features below 130nm in width, which is unprecedented in optical microscopy and is nearly 3x finer than for systems without this technology. This system suits analysis of smooth or smooth/stepped surfaces. AcuityXR preserve the wide field-of-view (FOV) and high performance benefits of Bruker non-contact, 3D optical surface profiling. With AcuityXR, dimensional repeatability on narrow structures has been shown to improve by more than a factor of 5.

AcuityXR is an optional capability that is now available on Bruker ContourGT-K1, X3 and X8 optical surface profilers. Introduced in 2010, the ContourGT family of non-contact, 3D optical surface profilers features Bruker-patented, high-brightness dual-LED illumination that, when combined with the system’s vertical resolution, improves sensitivity and stability and enables precision non-contact 3D surface metrology in difficult applications and environments that are challenging for other WLI-based systems. The ContourGT also features the new Bruker-developed and patent-pending Vision64 operating and analysis software and a reportedly intuitive, modular user interface that provides user-level-customization capabilities for a wide range of surface profiling metrology applications.

Bruker Corporation provides high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial and applied analysis. For more information, visit

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