MEMS 3D researchers license wet deposition from Alchimer

February 28, 2011 – Alchimer, nanometric deposition technology provider for through-silicon vias (TSVs), semiconductor interconnects, micro electro mechanical systems (MEMS), and other electronic applications, announced that the Centre de Collaboration MiQro Innovation/MiQro Innovation Collaborative Centre (C2MI) has licensed its suite of products.

The C2MI, which includes a state-of-the-art MEMS facility, was launched in 2009 by Université of Sherbrooke in Bromont Technoparc, Quebec, Canada. The center’s 200mm MEMS and 3D wafer-level-processing (WLP) equipment will enable its members to test a variety of materials for MEMS production.

Alchimer’s suite of products and its Electrografting (eG) technology will support the center’s 3D MEMS programs. Electrografting is Alchimer’s electrochemical process that enables the growth of extremely high-quality polymer and metal thin films.

The MiQro Innovation Collaborative Centre and its members are pushing the design rules in this space, at the leading edge of 3D integration in MEMS, said Alchimer CEO Steve Lerner.

"Alchimer Electrografting technology dramatically increases yields in MEMS, 3D-IC and on-chip interconnects, and provides strong support for work in advancing the technology for 3D MEMS manufacturing with a cost-effective approach," said Luc Ouellet, vice-president of R&D at Teledyne DALSA Semiconductor, a pure-play MEMS foundry.

Alchimer develops and markets innovative chemical formulations, processes and IP for the deposition of nanometric films used in a variety of microelectronic and MEMS applications, including wafer-level interconnects and TSVs (through-silicon vias) for 3D packaging. For more information, visit www.alchimer.com.

The MiQro Innovation Collaborative Centre (C2MI) is an original partnership between Université de Sherbrooke and microelectronics industry leaders. The initial investment (building and research equipment) of $218.45 million is supported by Industry Canada ($82.95 million), by the ministère du Développement économique, de l’Innovation et de l’Exportation ($94.9 million), by the town of Bromont (taxe exemption for 10 years, a $15 million value), by the founding partners and equipment suppliers ($40.6 million). Visit www.c2mi.ca to learn more.

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