MIT adds TESCAN SEM for nano MEMS microfluidics studies

March 8, 2011 – BUSINESS WIRE — TESCAN, scanning electron microscope and focused ion beam workstation maker, delivered a VEGA 3 scanning electron microscope (SEM) to the Massachusetts Institute of Technology (MIT).

The VEGA 3 SEM will support the undergraduate students in the mechanical engineering program, specifically in the Micro and Nano Engineering lab. This course, co-founded by Dr. Sang-Gook Kim encourages creative thinking through hands-on experience via building, observing and manipulating micro and nano scale structures (MEMS, Microfluidics and Nano Materials).

Click to EnlargeThe VEGA 3 includes high-performance electronics for faster image acquisition (down to 20ns/pixel) and signal processing, an ultra-fast scanning system with compensated static and dynamic image aberrations, an extended range of scanning modes using the original Wide Field Optics, In-Flight Beam Tracing for real-time beam optimization, updated software control with high level of automation, and built-in scripting for user-defined applications. The proprietary Intermediate Lens (IML) works as an "aperture changer." The column design, without any mechanical centering elements, allows fully automated column set-up and alignment. Live stereoscopic imaging, using the advanced 3D Beam Technology, enables 3D viewing and navigation of micro- and nanoscale subjects. Jaroslav Klima, CEO of TESCAN, noted that the SEM will perform easily in the leading-edge research arena with multiple users.

TESCAN is focused on research, development and manufacturing of scientific instruments and laboratory equipment. Learn more at

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