Combinatorial method can do for wafer processing tools what it has done for semiconductor materials

May 31, 2011 — What’s driving the semiconductor industry to new materials R&D methods? Combinatorial methods, high-productivity development tools, can shorten development times: getting to success or failure faster. Mike Besnard, ATMI, speaks with senior technical editor Debra Vogler at The ConFab 2011 in Las Vegas.

Listen to Besnard’s interview:

"The cost of R&D is going higher and higher every year," Besnard says. If combinatorial science can improve process technologies and manufacturing methods, new nodes can be less expensive; lowering the cost of advancing materials.

As the semiconductor industry goes to smaller and smaller nodes, is it possible to improve the combinatorial platform? Besnard says that, as you understand tool requirements, you can evolve the combinatorial platform to screen materials and also hardware. The correlation from development to high-volume manufacturing (HVM) really involves an interplay of materials and tool science, Besnard points out.

Combinatorial research compresses dozens to hundreds of experiments onto one wafer, with each processed individually. Learn more about it in these articles: 


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